Master of Science in Semiconductor Technology (MaST) | Electrical, Computer, and Systems Engineering

Master of Science in Semiconductor Technology (MaST) | Electrical, Computer, and Systems Engineering
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Master of Science in Semiconductor Technology (MaST)
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The Master of Science in Semiconductor Technology is a non-thesis post-bachelor’s degree program intended for those who wish to enter the semiconductor industry upon completion or engage in advanced research. The program is designed to reflect the broad range of needs and the interdisciplinary nature of the semiconductor field. The program includes core areas such as Semiconductor Devices and Processing, Circuits and Systems Design, and Power Electronics. The degree requires a set of semiconductor courses from the core areas and interdisciplinary elective courses. Students entering the program will typically hold an accredited bachelor’s degree in engineering or science, e.g., Electrical, Computer and Systems, Chemical, Materials, Mechanical, or Industrial Engineering, as well as Computer Science or Physics.  Master's project through research, co-op, internship, or similar experience is encouraged.  R
ensselaer is situated close to numerous semiconductor companies in the Hudson River Valley, including IBM, GlobalFoundries, Micron, OnSemi, and others, providing excellent opportunities for internships and co-op.
Substantial merit-based tuition scholarships are available to highly qualified MaST applicants.
Students interested in the MaST program should email inquiries to
ecse-admissions@rpi.edu
or book an appointment with the Graduate Program Administrator Dr. Melanie Ungar
using this link
Students pursuing the M.S. in Semiconductor Technology must complete the following requirements:
30 total credits of approved graduate course work
At least 18 credits taken at the 6000-level
Up to 12 credits taken at the 4000 (for co-listed 4xxx/6xxx courses, program students must take the 6000-level version of the course)
6 credits taken from the list of common core courses
A minimum of 6 credits taken from one list of specialized core courses
6 to 18 credits taken from interdisciplinary courses
Optional up to 6 master’s project credits 2
Optional up to 6 transfer credits
Optional up to 3 credits of Independent Study
No 1000- or 2000-level courses may be applied toward the degree.
Students who do not have adequate preparation for their chosen area of specialization may need to take background courses in addition to the 30-credit-hour requirement.
Footnotes:
With prior written approval from the Graduate Program Director, special topics courses (e.g., ECSE 496X or ECSE 696X) may be used to fulfill certain course requirements.
A master’s project in the semiconductor area, with faculty supervision and evaluation, is optional. It may be fulfilled or partially fulfilled by an internship or Co-Op at a semiconductor company. Such an experience must be planned with the approval of the Graduate Program Director.  A comprehensive report prepared at the conclusion of an internship or Co-Op or a similar practical experience must be endorsed by the student’s supervisor at the company/organization and evaluated and approved by the Graduate Program Director.
Courses for Master of Science in Semiconductor Technology
To acquire a depth and breadth of experience, master’s degree students must complete the requisite credits of core and interdisciplinary courses from the courses listed below. Sufficient courses are provided so that alternate selections are available for those who have previously completed some of the core courses. The courses offered are reviewed, updated and/or changed frequently to keep pace with rapid advancement in the field; some courses are delivered in alternate years. Please see the ECSE website for the most current information.
List of
common core
courses:
ECSE/MTLE 6300 - Integrated Circuit Fabrication Laboratory
ECSE/ENGR/ISCI 6961 - Advanced Materials, Metrology and Equipment for Semiconductor Manufacturing
With special permission
) ECSE 6210 Advanced Device Concepts
With special permission
) ECSE 6967 Advanced Lithography for Semiconductor Technology
List of courses for the
specialized core
of
Semiconductor Devices and Processing
ECSE 4250 - Integrated Circuit Processes and Design
or MTLE 4160 - Semiconducting Materials
or CHME 4600 - Introduction to Semiconductor Processing
ECSE 6200 - Semiconductor Device Characterization
ECSE 6210 - Advanced Device Concepts
ECSE 6220 - Physical Foundations of Solid-State Devices
ECSE 6230 - Semiconductor Devices and Models I
ECSE 6240 - VLSI Fabrication Technology
ECSE 6290 - Semiconductor Devices and Models II
List of courses for the
specialized core
of
Circuit and System Design
(no more than one 4000 level course can be selected):
ECSE 4030 – Analog IC Design
ECSE 4040 – Digital Electronics
ECSE 4080 – Semiconductor Power Electronics
ECSE 4220 – VLSI Design
ECSE 6090 – Advanced Power Electronics
ECSE 6200 – Semiconductor Device Characterization
ECSE 6230 – Semiconductor Devices and Models I
ECSE 6260 – Semiconductor Power Devices
ECSE 6310 – Fundamentals of RF/Microwave Engineering
ECSE 6320 – Advanced Computer Systems
ECSE 6680 – Advanced VLSI Design
ECSE 6700 – Advanced Computer Hardware Design
List of courses for the
specialized core
of
Power Electronics
(no more than one 4000 level course can be selected):
ECSE 4030 – Analog IC Design
ECSE 4080 – Semiconductor Power Electronics
ECSE 6090 – Advanced Power Electronics
ECSE 6200 – Semiconductor Device Characterization
ECSE 6230 – Semiconductor Devices and Models I
ECSE 6260 – Semiconductor Power Devices
List of
interdisciplinary
courses
CHME 4050 – Chemical Process Design: Fundamentals
or CHME 4060 – Chemical Process Design: Applications
CHME 6011 – Semiconductor Electrochemistry
ENGR 6120 – Advanced Manufacturing Processes and Systems
ISYE 4210 – Design and Analysis of Supply Chains
or ISYE 6600 – Design of Manufacturing System Supply Chain
ISYE 6780 – Introduction to Optimization
MANE 4730 – Heat Transfer
or MANE 6790 – Advanced Heat Transfer
MANE 6460 – Fracture Mechanics and Fatigue of Materials
MANE 6630 – Conduction Heat Transfer
or MANE 6640 – Radiation Heat Transfer
or MANE 6650 – Convective Heat Transfer
MTLE 4200 – Electrical and Optical Properties of Materials
MTLE 6120 – Advanced Electronic Properties of Materials
MTLE 6440 – Thin Films
MTLE 6430 – Materials Characterization
PHYS 6710 – Theory of Solids I
List of advanced undergraduate
foundational
courses:
ECSE 4030 – Analog IC Design
ECSE 4040 – Digital Electronics
ECSE 4050/6050 – Advanced Electronic Circuits
ECSE 4080 – Semiconductor Power Electronics
ECSE 4220 – VLSI Design
ECSE 4250 – Integrated Circuit Processes and Design
or MTLE 4160 – Semiconducting Materials
or CHME 4600 – Introduction to Semiconductor Processing (cross-listed)
ECSE 4310/6310 – Fundamentals of RF/Microwave Engineering
ECSE 4320/6320 – Advanced Computer Systems
ECSE 4370 – Introduction to Optoelectronics Technology
ECSE 4720/PHYS 4720 – Solid State Physics
ECSE 4770 – Computer Hardware Design
ECSE 4780/6700 – Advanced Computer Hardware Design
ECSE 4790 – Microprocessor Systems
Sample Program Templates
Sample templates for the Core of Semiconductor Devices and Processing
Fall Semester
Spring Semester
Course Number and Titles
Credits
Course Number and Titles
Credits
ECSE 6961 - Advanced Materials, Metrology and Equipment for Semiconductor Manufacturing
ECSE 6300 - Integrated Circuit Fabrication Laboratory
ECSE 6230 - Semiconductor Devices and Models I
ECSE 6200 - Semiconductor Device Characterization or ECSE 6210 - Advanced Device Concepts
ECSE 6220 - Physical Foundations of Solid-State Devices
MANE 6790 - Advanced heat Transfer
ECSE 4250 - Integrated Circuit Processes and Design
MTLE 6120 – Advanced Electronic Properties of Materials
ECSE 6270 - Optoelectronics or Master’s Project
ENGR 696x – Fabrication Technologies for Semiconductor Manufacturing
Term Credit Total
15
Term Credit Total
15
Sample templates for the Core of Circuit and System Design
Fall Semester
Spring Semester
Course Number and Titles
Credits
Course Number and Titles
Credits
ECSE 6961 - Advanced Materials, Metrology and Equipment for Semiconductor Manufacturing
ECSE 6300 - Integrated Circuit Fabrication Laboratory
ECSE 4220 - VLSI Design
ECSE 6680 – Advanced VLSI Design
ECSE 6320 – Advanced Computer Systems
ECSE 696x - Fabrication Technologies for Semiconductor Manufacturing
ECSE 6230 - Semiconductor Devices and Models I
MTLE 6120 – Advanced Electronic Properties of Materials
ISYE 6780 - Introduction to Optimization
ECSE 6310 – Fundamentals of RF/Microwave Engineering or Master’s Project
Term Credit Total
15
Term Credit Total
15
Contacts
Please reach out to the department's
Office of Graduate Student Services
Dr. Melanie Ungar, Graduate Program Administrator:
ungarm2@rpi.edu
(first point of contact)
Professor James Lu, MaST Program Advisor:
luj@rpi.edu
Professor Rich Radke, Graduate Program Director:
ecse-gpd@rpi.edu
Professor Tong Zhang, Admissions Committee Head:
ecse-admissions@rpi.edu
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